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torsional pendulum 扭擺。

torsional strength

Abstract : the operation principle , construction design , preparation technologies and testing methods of the micro - silicon electrostatically force - balanced accelerometer with torsional pendulum are introduced . there is the certain reference value to develop a micro - silicon accelerometer 文摘:介紹了硅微型扭擺式靜電力平衡加速度計的工作原理、結構設計、制備技術及測試方法,這對于研制硅微型加速度計具有一定的參考價值。